Product Details

The ZYGO ZMI-4104 is a high-performance 6U VME64x laser interferometer measurement electronics board, belonging to ZYGO ZMI series heterodyne displacement metrology family, used for ultra-precise position and displacement measurement in semiconductor lithography, wafer stage, optical alignment and high-end precision motion control systems. The ZMI-4104 variant also includes ZMI-4104C version with enhanced optical sensitivity, capable of working with extremely low return optical signal down to 0.07 µW, which greatly improves adaptability for complex optical path layout.

This board provides four independent measurement channels, supporting synchronous multi-axis displacement, pitch and yaw measurement. It adopts heterodyne interferometry quadrature signal processing, with 0.154 nm position resolution, maximum measurable velocity up to ±2.55 m/s, and high measurement stability under high-speed motion. It can connect with ZYGO ZMI series laser heads, interferometer optics and retroreflectors, and supports environmental compensation inputs for air pressure, temperature and humidity to correct air refractive index error and guarantee traceable nanometer-level metrology accuracy. Multiple ZMI-4104 boards can be synchronized together to expand the total measurement axes for large multi-stage equipment.

It follows VME64x bus standard, works as bus master and slave, supporting high-speed real-time position data output for closed-loop motion control. It has built-in signal quality monitoring function to track optical signal SNR and report signal loss or degradation, convenient for optical path debugging and long-term health diagnosis. The front panel is equipped with optical signal input ports and status LED indicators, which can quickly show power status, signal lock and measurement fault. Users can configure measurement parameters, axis assignment, filter and compensation parameters via dedicated ZYGO software before installation.

Onboard EMC protection and signal conditioning circuits suppress electromagnetic interference from servo drives and motion controllers, maintaining stable measurement output in industrial precision workshop environments. The PCB adopts high-precision analog layout and industrial-grade components, designed for continuous long-term operation in semiconductor manufacturing equipment, optical testing platforms, aerospace precision alignment and ultra-precision machine tools. This ZMI-4104 is widely supplied as spare replacement part for existing ZYGO laser metrology systems. Users need to match the corresponding laser head wavelength and optical accessories before installation. Conformal coated version is optional for high humidity and dusty factory environments. This module is commonly used in wafer scanner positioning, optical component measurement, precision stage calibration and nanometer motion feedback projects.

This 4 channel laser interferometer measurement board adopts standard 6U single-height VME64x rack mount structure. It draws power from the VME backplane. LED indicators display power status, signal lock and measurement fault for convenient on-site inspection. The operating temperature range is 0°C to 50°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 95% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports measurement parameter configuration backup for fast recovery after hardware replacement.

This ZYGO ZMI-4104 metrology board is widely applied in high-precision motion control and laser interferometer measurement systems. It provides four channels of nanometer-level displacement feedback for precision positioning stages. As a reliable spare part for ZYGO metrology systems, the ZYGO ZMI-4104 retains original optical signal timing and laser head compatibility, helping customers reduce maintenance cost of legacy ultra-precision measurement equipment.