Product Details

The ZYGO 8020-1513-01 is a discontinued two-channel isolation panel board designed for ZMI-501 standalone metrology enclosure, serving as internal signal isolation component inside ZMI-501 measurement electronics assembly. It is used together with ZMI-501 main measurement board and ZMI-7705 heterodyne laser head for high-precision displacement metrology, widely applied in semiconductor wafer stage and optical precision motion measurement systems.

This board realizes electrical isolation for two independent measurement channels, effectively eliminating ground loop interference and crosstalk noise between signal paths, which stabilizes the optical beat signal transmission from interferometer optics to the measurement processing circuit. It routes fiber input signals and reference clock signals with strict isolation design, ensuring the cyclic error correction function works normally and avoids unexpected measurement jump. The power supply is +5.2VDC, matched with the power rail of ZMI-501 chassis. It is an internal dedicated accessory for ZMI-501 series, cannot be directly used for ZMI-501A or ZMI 2000 VME series boards without mechanical and firmware adaptation. Multiple ZMI-501 chassis each contain one set of this isolation board for dual-channel measurement.

It is equipped with signal routing circuits, isolation circuits and auxiliary signal terminals. The signal status is linked to the front panel LED indicators of the ZMI-501 enclosure, showing power status, signal lock and fault alarm for convenient on-site inspection and troubleshooting. The PCB layout adopts reinforced EMC shielding and anti-vibration design, adapting to the cleanroom environment of lithography equipment and resisting electromagnetic interference from linear motors and servo drivers. Users need to confirm full part number 8020-1513-01 and match original ZMI-501 housing, main measurement board and ZMI-7705 laser head before replacement. This legacy ZYGO 8020-1513-01 isolation board is mainly supplied as spare replacement part for repairing ZMI-501 metrology units. Users need to complete signal routing check and parameter calibration after installation. A conformal coated version is optional for high humidity and dusty industrial sites. This board is widely used in wafer stage maintenance, optical metrology bench upgrade and sub-nanometer motion feedback projects.

This two-channel isolation PCB is built-in component for ZMI-501 enclosed measurement unit. It requires +5.2VDC power supply. Linked front panel LED indicators display power, signal lock and fault status for convenient on-site inspection. The operating temperature range is 0°C to 40°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 85% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports measurement parameter configuration backup for fast recovery after hardware replacement.

This ZYGO 8020-1513-01 isolation board is widely applied in ZMI-501 heterodyne laser interferometer measurement systems. It isolates measurement channels and suppresses noise to guarantee stable sub-nanometer position data output. As a reliable spare part for ZYGO legacy metrology systems, the 8020-1513-01 retains original signal isolation characteristics and compatibility, helping customers reduce maintenance cost of legacy ultra-precision measurement equipment.