Product Details

The ZYGO 8080-0338-01 is a discontinued passive optical fiber splitter assembly designed for ZMI heterodyne interferometer metrology system, compatible with ZMI-501, ZMI-501A measurement electronics and ZMI-7705 laser head. It is used to split the 20MHz beat frequency optical signal output from laser source and distribute to multiple interferometer optics, widely used in semiconductor wafer stage, reticle stage and ultra-precision motion positioning systems.

This optical splitter assembly adopts low-loss single-mode fiber design, maintains stable polarization state of dual-frequency laser to avoid beat frequency signal attenuation and polarization fading. It realizes optical signal distribution for multi-axis measurement channels, keeps the phase consistency of each branch optical path, which is critical for cyclic error correction and synchronous position sampling of multi-axis interferometer system. The optical wavelength is 632.8nm, low insertion loss and high return loss are reserved to reduce back-reflection that may cause laser unlock and measurement jump. It is a dedicated optical accessory for ZMI-501 platform, cannot be directly matched with ZMI 2000 VME series measurement boards without optical path adaptation. Multiple splitter assemblies can be cascaded to expand more measurement axes according to system layout.

It is equipped with fiber input port, multi-channel fiber output ports and metal protective housing. The fiber connectors are precisely aligned to guarantee stable optical coupling. The housing adopts vibration damping and EMC shielding structure, adapting to cleanroom environment and resisting mechanical vibration and electromagnetic interference from linear motors and servo drivers. Users need to confirm full part number 8080-0338-01 and match original ZMI-7705 laser head, ZMI-501A measurement unit and interferometer optics before replacement. This legacy ZYGO 8080-0338-01 fiber splitter assembly is mainly supplied as spare replacement part for repairing ZMI metrology systems. Users need to check optical power balance and signal lock status after installation. A conformal coated version is optional for high humidity and dusty industrial sites. This fiber assembly is widely used in wafer stage maintenance, optical metrology bench upgrade and sub-nanometer closed-loop motion feedback projects.

This fiber splitter assembly adopts sealed metal housing structure, no extra power supply required. Fiber ports support quick plug and connection for convenient on-site inspection and replacement. The optimal operating temperature range is 15°C to 30°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 50% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports optical path calibration backup for fast recovery after hardware replacement.

This ZYGO 8080-0338-01 fiber splitter assembly is widely applied in high-precision heterodyne laser interferometer measurement systems. It distributes dual-frequency optical signal and maintains polarization stability for multi-axis measurement. As a reliable spare part for ZYGO legacy metrology systems, the 8080-0338-01 retains original optical loss and polarization characteristics, helping customers reduce maintenance cost of legacy ultra-precision measurement equipment.