Product Details

The ZYGO PCB-I-E-144 is a discontinued internal control PCB board for ZMI-2001 6U VME heterodyne interferometer measurement board, belonging to ZYGO ZMI 2000 series metrology electronics. It is the core circuit board inside the ZMI-2001 assembly, responsible for receiving 20MHz beat optical signal, signal conditioning, PLL lock processing and position data calculation, cooperating with ZYGO 7702,7714 series dual-frequency laser heads for nanometer displacement measurement. It is widely used in semiconductor lithography wafer stage, reticle stage and ultra-precision motion positioning closed-loop control systems.

This PCB is designed for single-axis measurement function matching ZMI-2001. It supports 632.8nm He-Ne laser wavelength, the displacement resolution reaches 0.31nm for 2-pass measurement and 0.15nm for 4-pass measurement, maximum measurable velocity is ±2.1m/s. It integrates cyclic error correction, signal loss detection and PLL status monitoring circuits to reduce nonlinear measurement error and avoid lithography overlay error. It communicates with host controller via VME backplane and P2 high-speed interface, supports synchronous clock input and output for multi-board synchronization in multi-axis systems. This PCB is an internal component of ZMI-2001 assembly, cannot be directly interchanged with ZMI-2002, ZMI-501A or other ZMI series electronics boards without matching housing and firmware.

It is equipped with optical signal processing circuit, VME bus interface circuit and status signal circuit. Corresponding status LED indicators on the front panel show power, PLL lock, signal loss and fault alarm for convenient on-site inspection and troubleshooting. The PCB layout adopts reinforced EMC shielding and anti-vibration design, resisting electromagnetic interference from linear motors and servo drivers inside cleanroom lithography equipment. Users need to confirm full part number PCB-I-E-144 and match ZMI-2001 housing, fiber assembly and compatible ZYGO laser head before replacement. This legacy ZYGO PCB-I-E-144 is supplied as spare replacement part for repairing ZMI-2001 measurement boards. Users need to complete optical alignment, axis parameter configuration and calibration after installation. A conformal coated version is optional for high humidity and dusty industrial sites. This PCB is widely used in maintenance and retrofit of Nikon, Canon lithography scanners, precision metrology platforms and sub-nanometer motion feedback systems.

This core control PCB is the internal circuit board of standard 6U VME ZMI-2001 card. It requires +5V power supply. Matching front panel LED indicators display power, PLL lock and fault status for convenient on-site inspection. The operating temperature range is 0°C to 40°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 85% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports measurement parameter configuration backup for fast recovery after hardware replacement.

This ZYGO PCB-I-E-144 control PCB is widely applied in high-precision heterodyne laser interferometer measurement systems. It processes optical beat signal and outputs nanometer level position data for precision positioning stages. As a reliable spare part for ZYGO legacy metrology systems, the PCB-I-E-144 retains original signal timing and optical compatibility, helping customers reduce maintenance cost of legacy ultra-precision lithography and measurement equipment.