Product Details

The ZYGO 8020-0450 ZMI-2002 is a discontinued dual-axis 6U VME bus measurement board belonging to ZMI 2000 series heterodyne interferometer electronics. It is designed to receive 20MHz beat optical signal from ZYGO 7702,7714 series dual-frequency laser heads, convert optical interference signal into high-precision digital position data for closed-loop servo control, widely deployed in semiconductor lithography wafer stage, reticle stage and ultra-precision motion positioning systems.

This board supports two independent measurement axes per card, multiple boards can be installed in one VME chassis to expand multi-axis synchronous measurement. It adopts 632.8nm He-Ne laser wavelength, the displacement resolution reaches 0.31nm for 2-pass measurement and 0.15nm for 4-pass measurement, maximum measurable velocity is ±2.1m/s. It features built-in cyclic error correction, signal dropout detection and PLL status monitoring functions to reduce nonlinear measurement error and avoid overlay error for lithography equipment. The power supply is +5V@4.2A, it communicates with host controller via VME backplane and P2 high-speed interface, and supports synchronous clock input and output for multi-board synchronization. Its firmware and optical interface are dedicated to ZMI 2000 series, cannot be directly replaced with ZMI-2001 or ZMI-501A modules.

The front panel is equipped with fiber optical input ports, status LED indicators and auxiliary signal connectors for power, PLL lock, signal loss and fault alarm, convenient for on-site inspection and troubleshooting. The PCB is designed with reinforced EMC shielding and vibration resistant layout to resist electromagnetic interference from linear motors and servo drivers inside cleanroom lithography tools. Users need to confirm full part number 8020-0450 and model ZMI-2002 before replacement, match compatible ZYGO laser head, fiber assembly and interferometer optics. This legacy ZYGO ZMI-2002 board is mainly supplied as spare replacement part for existing ZMI metrology systems. Users need to complete optical alignment, axis parameter configuration and calibration after installation. A conformal coated version is optional for high humidity and dusty industrial sites. This board is widely used in maintenance and retrofit of Nikon, Canon lithography scanners, precision metrology platforms and sub-nanometer motion feedback systems.

This dual-axis interferometer measurement board adopts standard 6U VME card structure. It requires +5V power supply. LED indicators display power, PLL lock and fault status for convenient on-site inspection. The operating temperature range is 0°C to 40°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 85% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports measurement parameter configuration backup for fast recovery after hardware replacement.

This ZYGO 8020-0450 ZMI-2002 measurement board is widely applied in high-precision heterodyne laser interferometer measurement systems. It decodes optical beat signal and outputs nanometer level position data for precision positioning stages. As a reliable spare part for ZYGO legacy metrology systems, the ZMI-2002 retains original signal timing and optical compatibility, helping customers reduce maintenance cost of legacy ultra-precision lithography and measurement equipment.