Product Details

The ZYGO ZMI-2002, part number 8020-0211, is a discontinued 6U VMEbus dual-axis heterodyne laser interferometer measurement board, belonging to the early ZYGO ZMI metrology series, widely deployed in legacy semiconductor positioning stages, optical lithography equipment and ultra-precision motion control systems. It adopts 633nm frequency-stabilized He-Ne laser heterodyne signal processing architecture, supporting two independent measurement channels on one single board, which can synchronously collect displacement, velocity and acceleration data for two motion axes, effectively saving VME chassis slot resources.

This board achieves typical 0.1nm sub-nanometer position resolution, with time resolution up to 25ns and P2 bus data throughput up to 7.7MHz, supporting real-time position feedback for closed-loop servo control. It supports daisy-chain connection via P2 interface, and multiple ZMI-2002 boards can be cascaded to expand up to 16 measurement axes for multi-stage combined positioning platforms. It is equipped with fiber optical signal input and BNC reference signal ports, and supports environmental compensation signal access for air temperature, pressure and humidity to compensate air refractive index drift and guarantee long-term measurement traceability. It integrates real-time signal quality monitoring, including PLL lock status, optical signal loss and error flag output, which helps engineers quickly judge optical path deviation and signal attenuation during optical alignment.

It complies with VMEbus specification, supporting A16/A24 addressing and D16/D32 data transmission, and can work as bus master or slave to exchange high-speed position data with the host VME CPU. Users can configure measurement scale factor, filter parameters and interrupt mapping through dedicated ZYGO configuration software. The onboard EMC signal conditioning circuit suppresses electromagnetic noise from servo drivers and linear motor controllers, maintaining stable measurement output in precision clean workshop environments. The front panel carries status LED indicators for power, signal lock and fault alarm, convenient for routine inspection and commissioning. The PCB adopts high-precision analog layout and industrial-grade components, suitable for long-term continuous operation in wafer positioning equipment, optical component testing, ultra-precision machine tools and aerospace alignment systems. This legacy ZMI-2002 board is mainly supplied as spare replacement parts for existing ZYGO laser metrology systems. Users need to match the corresponding He-Ne laser head and optical interferometer accessories before installation. A conformal coated version is optional for high humidity and dusty industrial sites. This module is widely used in precision stage calibration, nanometer motion feedback and old laser measurement system renovation projects.

This dual channel laser interferometer measurement board adopts standard 6U single-height VME rack mount structure. It draws power from the VME backplane. LED indicators display power status, signal lock and measurement fault for convenient on-site inspection. The operating temperature range is 0°C to 40°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 95% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports measurement parameter configuration backup for fast recovery after hardware replacement.

This ZYGO ZMI-2002 metrology board is widely applied in high-precision motion control and laser interferometer measurement systems. It provides two channels of sub-nanometer displacement feedback for precision positioning stages. As a reliable spare part for ZYGO legacy metrology systems, the ZYGO ZMI-2002 retains original heterodyne signal timing and laser head compatibility, helping customers reduce maintenance cost of legacy ultra-precision measurement equipment.