Product Details

The ZYGO 8040-0130-01D is a discontinued custom dual-frequency He-Ne heterodyne laser head, specially engineered for Nikon NSR-S620D ArF immersion lithography scanner wafer stage and reticle stage displacement metrology system. It belongs to ZYGO ZMI high-precision metrology series and works with ZMI interferometer processing boards to deliver sub-nanometer closed-loop position feedback for high-speed motion stages. It outputs 632.8nm frequency-stabilized two-frequency laser with orthogonal linear polarization, fixed beat frequency difference of 20MHz ±1600Hz, supplying the reference optical signal required for heterodyne interferometer position decoding.

This 8040-0130-01D variant is upgraded compared to 8040-0128-01, with optimized optical power, frequency stability and back-reflection suppression, tuned to match the NSR-S620D scanner’s air refractive compensation algorithm and servo control parameters. It is equipped with built-in high-performance optical isolator to block reflected light from interferometer optics and retroreflectors, effectively preventing PLL lock loss and measurement jump that cause overlay error during lithography exposure. The power supply is ±15VDC and +5VDC, and it requires a long warm-up period to reach stable wavelength before mass production exposure. Multiple laser heads of this part number can be installed inside one scanner to support synchronous multi-axis measurement for wafer and reticle stages. Its mechanical mounting interface, fiber coupling port and beam specification are proprietary for NSR-S620D, not interchangeable with standard 7702,7714 or 8040-0128-01 laser heads.

It is fitted with BNC beat signal output, laser interlock and temperature monitoring interface. The front panel has power and laser lock LED indicators for on-site status check and fault diagnosis. The housing adopts reinforced vibration damping structure and full EMC shielding, resisting electromagnetic noise generated by linear motors and servo drivers inside the scanner clean chamber. Users must confirm the full part number 8040-0130-01D and machine model NSR-S620D before replacement, and match the original interferometer optics, fiber assembly and compatible ZMI measurement board. This legacy ZYGO 8040-0130-01D is supplied as spare replacement part for maintenance of Nikon NSR-S620D immersion scanners. Users need to complete optical power, frequency difference and optical path alignment calibration after installation. A conformal coated version is optional for high humidity and dusty industrial sites. This laser head is widely used in refurbishment, maintenance and nanometer motion feedback of NSR-S620D lithography tools.

This heterodyne He-Ne laser head adopts dedicated compact housing structure for scanner internal installation. It requires ±15VDC and +5VDC power supply. LED indicators display power and laser lock status for convenient on-site inspection. The optimal operating temperature range is 18°C to 24°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 50% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports optical path calibration backup for fast recovery after hardware replacement.

This ZYGO 8040-0130-01D laser head is widely applied in high-precision laser interferometer measurement system of Nikon NSR-S620D immersion scanner. It provides stable dual-frequency laser source for ZMI interferometer boards. As a reliable spare part for ZYGO legacy metrology systems, the ZYGO 8040-0130-01D retains original heterodyne frequency characteristics and optical compatibility, helping customers reduce maintenance cost of legacy ultra-precision lithography equipment.