Product Details

The ZYGO 8040-0128-01 is a discontinued custom heterodyne He-Ne laser head, specially matched for Nikon NSR-S610C ArF immersion lithography scanner wafer stage displacement metrology system. It belongs to ZYGO high-precision ZMI metrology series, designed to work with ZMI interferometer processing boards to realize nanometer-level closed-loop position feedback for wafer and reticle stages. It outputs 632.8nm frequency-stabilized dual-frequency laser with two orthogonal polarization states, fixed beat frequency difference of 20MHz ±1600Hz, providing the required reference optical signal for heterodyne interferometer position decoding.

This laser head is factory optimized for NSR-S610C immersion scanner internal optical layout and servo control logic. It has matched optical power output and beam parameter, internal integrated high-performance optical isolator to suppress reflected light interference from interferometer optics and corner cube retroreflectors, avoiding PLL unlock and measurement jump which will cause overlay error of lithography equipment. The power supply is ±15VDC and +5VDC, it needs long warm-up cycle to reach wavelength stability before formal exposure production. Multiple laser heads of this part number can be deployed in one scanner to support multi-axis synchronous measurement of wafer stage. Its optical connector, beam size and mounting interface are dedicated for Nikon NSR-S610C, cannot be directly replaced with general 7702 or 7714 standard laser heads.

It is equipped with BNC beat signal output, laser interlock and temperature monitoring interface. The front panel integrates power and laser lock LED indicator for on-site status check and fault troubleshooting. The housing adopts enhanced vibration damping and full EMC shielding structure, resisting electromagnetic noise from linear motor and servo drivers inside the scanner clean chamber. Users need to confirm full part number 8040-0128-01 and machine model NSR-S610C before replacement, and match the original interferometer optics, optical fiber and ZMI measurement board. This legacy ZYGO 8040-0128-01 is supplied as spare replacement part for maintenance of Nikon NSR-S610C immersion scanners. Users must verify optical power, frequency difference and optical path alignment after installation. A conformal coated version is optional for high humidity and dusty industrial sites. This laser head is widely used in refurbishment, maintenance and nanometer motion feedback of NSR-S610C lithography tools.

This heterodyne He-Ne laser head adopts dedicated compact housing structure for scanner installation. It requires ±15VDC and +5VDC power supply. LED indicators display power and laser lock status for convenient on-site inspection. The optimal operating temperature range is 18°C to 24°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 50% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports optical path calibration backup for fast recovery after hardware replacement.

This ZYGO 8040-0128-01 laser head is widely applied in high-precision laser interferometer measurement system of Nikon NSR-S610C immersion scanner. It provides stable dual-frequency laser source for ZMI interferometer boards. As a reliable spare part for ZYGO legacy metrology systems, the ZYGO 8040-0128-01 retains original heterodyne frequency characteristics and optical compatibility, helping customers reduce maintenance cost of legacy ultra-precision lithography equipment.