Product Details

The ZYGO 7714 is a discontinued water-cooled two-frequency He-Ne heterodyne laser head of ZMI series, developed to match ZMI 240X and 4X04 series interferometer measurement boards for high-end semiconductor lithography, ultra-precision wafer stage positioning and high-channel-count optical metrology systems. Compared with air-cooled 7702, it adopts water cooling structure to achieve superior frequency stability, which is suitable for long-term continuous high-precision measurement tasks with strict drift requirements. It outputs 632.8nm laser with two orthogonal linear polarization frequencies, fixed frequency difference of 20MHz ±1600Hz, providing stable beat reference signal for heterodyne interferometer position decoding.

This laser head supports high optical power output, one single laser can drive more measurement axes than 7702. It integrates built-in high-performance optical isolator, effectively protecting laser cavity from back reflection from interferometer optics and retroreflectors, avoiding frequency lock loss and measurement jump. It is equipped with BNC RF beat output port, laser interlock interface and temperature monitoring signal port, supporting real-time laser health monitoring. The power supply is ±15VDC and +5VDC, plus dedicated water circulation cooling loop. It requires longer warm-up time to reach the ultra-stable wavelength state. Multiple ZYGO 7714 laser heads can be integrated into one large multi-stage positioning system.

It is equipped with power and laser lock status LED indicators on the front panel for routine inspection and fault diagnosis. The housing adopts reinforced vibration damping structure and full EMC shielding design to resist electromagnetic noise interference from linear motors and servo drivers in cleanroom environments. Users need to configure qualified cooling water circulation system, match the corresponding interferometer optics, retroreflectors and ZMI measurement boards. Beam specifications and optical accessories cannot be mixed with 7702 series. This legacy ZYGO 7714 laser head is mainly supplied as spare replacement parts for existing ZMI metrology systems. Users need to verify optical power, frequency difference and cooling circuit condition before replacement. A conformal coated version is optional for high humidity and dusty industrial sites. This laser head is widely used in legacy multi-axis laser interferometer system renovation, high-precision wafer scanner positioning and sub-nanometer closed-loop motion feedback projects.

This water-cooled two-frequency He-Ne laser head adopts standalone heavy-duty housing structure. It requires ±15VDC, +5VDC power supply and water cooling loop. LED indicators display power and laser lock status for convenient on-site inspection. The optimal operating temperature range is 18°C to 24°C, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 50% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports optical path calibration backup for fast recovery after hardware replacement.

This ZYGO 7714 laser head is widely applied in high-precision laser interferometer measurement systems. It provides ultra-stable two-frequency laser source for ZMI 240X and 4X04 series measurement boards. As a reliable spare part for ZYGO legacy metrology systems, the ZYGO 7714 retains original heterodyne frequency characteristics and optical compatibility, helping customers reduce maintenance cost of legacy ultra-precision measurement equipment.