Product Details

The ZYGO 7701AE, part number 6191-0460, is a discontinued 6mm beam two-frequency He-Ne heterodyne laser head, a dedicated variant of the 7701 series, designed as the matched optical source for ZMI-2001 and ZMI-2002 VME interferometer measurement boards, widely deployed in legacy semiconductor displacement metrology systems. It outputs 632.8nm frequency-stabilized laser with two orthogonal linear polarization frequencies, fixed frequency difference at 20MHz ±1600Hz, providing the required reference optical signal for heterodyne interferometer displacement calculation.

This AE version comes with 6mm beam diameter, supporting maximum measurement distance up to 25 meters, suitable for long-stroke optical path layout. The output optical power is higher than 550μW, wavelength long-term accuracy reaches ±0.1ppm, with stable frequency performance for continuous long-term metrology tasks. The rated supply voltage is ±15VDC, requiring more than 7 minutes preheat time to reach stable measurement state. It can be connected via free-space optical path or fiber coupling to interferometer optics, and the returned optical signal is sent to ZMI-2001 or ZMI-2002 processing boards for position decoding. Multiple 6191-0460 laser heads can be integrated into one system to support multi-axis precision positioning stages.

It integrates built-in optical isolator and temperature control structure to suppress frequency drift caused by ambient temperature variation. The housing adopts vibration damping and EMC shielding design to reduce noise interference from servo drives in cleanroom environments. The front panel is equipped with power indicator and laser lock status LED for daily inspection and fault diagnosis. Users need to match this laser head with compatible ZMI measurement board, interferometer optics and retroreflectors, and verify optical power and frequency difference consistency before replacement. This legacy ZYGO 7701AE 6191-0460 laser head is mainly supplied as spare replacement parts for existing ZMI metrology systems. Users must confirm the part number and beam specification when replacing old laser units to avoid optical mismatch. A conformal coated version is optional for high humidity and dusty industrial sites. This laser head is widely used in old laser interferometer system renovation, wafer stage positioning and nanometer motion feedback projects.

This two-frequency He-Ne laser head adopts standalone compact housing structure. It requires ±15VDC power supply. LED indicators display power and laser lock status for convenient on-site inspection. The operating temperature range is 18°C to 25°C for optimal metrology performance, storage temperature ranges from -40°C to +85°C, relative humidity 5% to 50% non-condensing. It complies with industrial shock, vibration and EMC standards and has CE certifications. It supports optical path calibration backup for fast recovery after hardware replacement.

This ZYGO 7701AE 6191-0460 laser head is widely applied in high-precision laser interferometer measurement systems. It provides stable two-frequency laser source for ZMI series measurement boards. As a reliable spare part for ZYGO legacy metrology systems, the ZYGO 7701AE 6191-0460 retains original heterodyne frequency characteristics and optical compatibility, helping customers reduce maintenance cost of legacy ultra-precision measurement equipment.