Product Details

The INFICON BCG450-SD353-557 is a high-precision TripleGauge vacuum gauge, also known as pressure sensor or gauge sensor, compatible with AMAT semiconductor wafer processing vacuum chamber systems. It integrates Bayard-Alpert, Pirani and capacitance diaphragm measurement technology into one compact unit, equipped with DeviceNet digital bus interface. This vacuum gauge measures pressure from ultra-high vacuum to atmospheric range, converts pressure readings into digital signals and transmits real-time vacuum data to the host control system. Reliable vacuum monitoring maintains stable chamber pressure during wafer etching, thin film deposition and chamber purge cycles, ensuring consistent process recipe parameters and wafer yield. If abnormal vacuum pressure or sensor failure occurs, the gauge feeds fault alerts to the controller and triggers safety interlock actions to protect wafers and vacuum chamber hardware. Optimized for semiconductor cleanroom environments, this pressure sensor adopts low outgassing construction, resisting thermal cycling and corrosive process gas erosion for long-term continuous fab operation.

This gauge sensor comes with DN25 ISO-KF vacuum connection interface. Built-in Pirani interlock function protects the hot filament from burnout. The internal calibration chip supports convenient calibration management. Every unit is fully calibrated and tested before shipment to guarantee pressure reading accuracy. The operating temperature range is -10℃~+60℃, matching AMAT wafer fabrication vacuum chamber working environments. This vacuum gauge is widely used for chamber maintenance, old pressure gauge replacement and vacuum monitoring system calibration. Replacing INFICON BCG450-SD353-557 can restore accurate full-range vacuum pressure measurement and reduce unexpected production downtime.

Specifications

Brand: INFICON

Model: BCG450-SD353-557

Product Type: TripleGauge Combined Vacuum Gauge

Alias: DeviceNet Pressure Transmitter

Interface: DeviceNet

Connection: DN25 ISO-KF

Measurement Range: 5×10⁻¹⁰ ~ 1500 mbar

Feature: Low outgassing, pre-calibrated, filament protection, digital bus communication

Function: Full range vacuum pressure measurement, digital pressure feedback

Operating Temperature:-10℃~+60℃

Application:Semiconductor manufacturing vacuum chamber pressure monitoring system