Product Details

The AMAT DIP-414-560 is a precision insulator part and chamber insert, also known as a dielectric component for Applied Materials semiconductor wafer processing vacuum chamber systems. It is installed inside the plasma reaction chamber, responsible for electrical isolation between high-voltage plasma components and grounded chamber structures, suppressing plasma arcing and short circuit risks. This dielectric component maintains stable plasma environment during wafer etching and thin film deposition processes. Reliable insulation performance directly guarantees plasma uniformity, stable film deposition parameters and consistent wafer yield. If insulation degradation or abnormal discharge occurs, the component will trigger equipment fault alerts to protect silicon wafers and expensive chamber hardware from permanent damage. Optimized for semiconductor cleanroom and vacuum working conditions, this insulator part is manufactured from high-purity ceramic dielectric material, featuring low outgassing, low particle generation and excellent resistance to plasma bombardment and corrosive reactive process gases. It can withstand long-term thermal cycling and plasma erosion for continuous mass fab operation.

This chamber insert adopts high-precision CNC machining and strict dimensional tolerance control. Optimized surface finish reduces particle accumulation inside vacuum environment. Standard mounting interface supports fast installation and replacement during chamber preventive maintenance. Each unit is inspected for dielectric strength and particle contamination level before delivery. The operating temperature range is -10℃~+120℃, suitable for AMAT vacuum plasma wafer processing platforms. This insulator part is widely used for chamber overhaul, worn dielectric component replacement and plasma system maintenance. Replacing AMAT DIP-414-560 can restore reliable electrical isolation of the plasma chamber and reduce unexpected production downtime.

Specifications

Brand: AMAT (Applied Materials)

Model: DIP-414-560

Product Type: Process Insulator Component

Alias: Chamber Insert, Dielectric Part

Material: High purity ceramic, low outgassing, plasma resistant

Feature: High dielectric strength, anti-corrosion, cleanroom & vacuum grade

Function: Electrical isolation, plasma arc suppression

Operating Temperature:-10℃~+120℃

Application:Semiconductor manufacturing vacuum plasma processing chamber