Product Details

The AMAT 0190-04098 is a precision thermocouple and temp sensor, also known as a temperature probe, built for Applied Materials semiconductor wafer processing vacuum chamber systems. It is mounted on the process chamber body, continuously measuring real-time temperature inside the chamber during wafer etching, thin film deposition and chamber purge cycles. This temperature probe converts thermal readings into standard electrical signals and sends feedback data to the VME control PCB, allowing the system to adjust heater power automatically and maintain consistent chamber temperature. Stable temperature control directly guarantees uniform film quality and wafer repeatability. Once temperature exceeds safe threshold values, the thermocouple will transmit fault alerts to the host controller and activate safety interlock protection to avoid wafer defects and chamber hardware damage. Optimized for semiconductor cleanroom and vacuum environments, this temp sensor adopts low outgassing and corrosion-resistant construction, capable of resisting thermal cycling and minor corrosive process gas erosion for long-term continuous fab operation.

This temperature probe features compact probe structure and high measuring accuracy with good repeatability. It uses standard signal interface compatible with AMAT analog signal boards. The assembly is pre-calibrated before shipment to ensure measurement accuracy. The outer sheath is made of high-temperature resistant alloy material. The working temperature detection range covers typical semiconductor chamber operating range. The ambient working temperature range is -10℃ to +120℃, suitable for AMAT wafer fabrication vacuum chamber environments. This thermocouple is widely used for chamber maintenance, aged temperature sensor replacement and process chamber calibration. Installing AMAT 0190-04098 can restore accurate chamber temperature monitoring function and reduce unexpected production downtime.

Specifications

Brand: AMAT (Applied Materials)

Model: 0190-04098

Product Type: Thermocouple Assembly

Alias: Temperature Sensor, Temperature Probe

Feature: Low outgassing, vacuum compatible, corrosion resistant, pre-calibrated

Signal: Analog temperature feedback signal

Mounting: Chamber port mounting

Operating Temperature:-10℃~+120℃

Application:Semiconductor manufacturing vacuum process chamber temperature monitoring