Product Details

The AMAT 0130-11002 is a reliable io card and vme board, also known as a digital module, specially engineered for Applied Materials Precision 5000 series semiconductor wafer processing equipment. It serves as the signal interface between the main VME system controller and field sensors, pneumatic solenoid valves, actuators and safety interlock components inside the wafer chamber. This digital module collects discrete digital input signals from the production site and transmits control commands from the host controller to field execution units, realizing real-time signal interaction during wafer etching, thin film deposition and chamber cleaning processes. It continuously monitors channel working status and feeds back fault signals immediately once abnormal states appear, triggering machine protection logic to prevent wafer damage and equipment failure. Designed for semiconductor cleanroom conditions, this io card adopts anti-electromagnetic interference PCB layout, resisting internal machine noise and supporting stable long-duration continuous operation.

This vme board is a standard plug-in VME card that can be installed directly into the VME chassis to achieve high-speed data communication with other VME modules through the backplane. It comes with 16 digital input channels and 16 digital output channels, and each channel is equipped with 500Vdc isolation protection to avoid signal crosstalk and circuit damage caused by ground loops. LED indicators on the front panel clearly display the on/off status of each channel, making on-site inspection and fault diagnosis much easier. The rated working voltage is 24VDC, and the operating temperature ranges from -10℃ to +60℃, which fits the internal thermal environment of AMAT wafer fabrication tools. This digital module is widely used for equipment maintenance, faulty board replacement and system overhaul. Replacing AMAT 0130-11002 can restore the machine’s digital signal control function and effectively reduce production downtime.

Specifications

Brand: AMAT (Applied Materials)

Model: 0130-11002

Product Type: Digital I/O VME Card

Channels:16 digital inputs,16 digital outputs

Isolation:500Vdc channel isolation

Bus: VME bus

Power Supply:24VDC

Operating Temperature:-10℃~+60℃

Indicators:LED channel status indicators

Application:Semiconductor manufacturing equipment