Product Details

The AMAT 0120-93488 is a precision pressure sensor and process transducer, also known as a vacuum sensor, designed for Applied Materials semiconductor wafer processing systems. It is installed inside the process chamber to continuously detect gas pressure and vacuum levels during wafer etching, thin film deposition and chamber purge operations. This vacuum sensor converts real-time pressure readings into standard electrical signals and transmits the data to the main VME control board, allowing the system to adjust gas flow and pumping speed automatically to maintain stable chamber pressure. Accurate pressure monitoring is critical for consistent semiconductor process results, and this pressure sensor can quickly capture pressure fluctuations and send alarm signals to the controller once parameters exceed safe thresholds, preventing wafer defects and equipment faults. Optimized for cleanroom fab environments, the process transducer features corrosion-resistant sensing components, low outgassing construction and stable measurement performance, suitable for long-term continuous operation inside semiconductor process chambers.

This pressure sensor adopts high-precision sensing element with excellent repeatability and anti-interference ability. It supports analog signal output compatible with AMAT analog I/O boards. The sensor body is compact for easy installation and replacement on chamber ports. Built-in overpressure protection prevents damage caused by sudden pressure spikes. The working temperature range is -10℃ to +60℃, matching the operating environment of AMAT wafer fabrication tools. This vacuum sensor is widely used for equipment maintenance, faulty sensor replacement and chamber calibration. Replacing AMAT 0120-93488 can restore accurate pressure monitoring function and reduce production downtime.

Specifications

Brand: AMAT (Applied Materials)

Model: 0120-93488

Product Type: Pressure Sensor / Vacuum Transducer

Measuring Range: Vacuum to low pressure range

Signal Output: Analog signal

Feature: Low outgassing, corrosion resistant, overpressure protection

Mounting: Chamber port mounting

Operating Temperature:-10℃~+60℃

Application:Semiconductor manufacturing equipment