Product Details

The AMAT 0090-01220 is a precision gas assembly and process fitting, also known as a gas connector, engineered for Applied Materials Precision 5000 semiconductor wafer processing equipment. It is installed on the process gas manifold system, serving as the connection assembly between gas supply pipelines, mass flow controllers and reaction chambers. This gas connector delivers stable transmission of process gases, maintains gas path tightness during wafer etching, thin film deposition and chamber purging cycles. It effectively prevents gas leakage and air ingress, ensuring the gas composition and flow rate inside the chamber remain consistent with recipe settings, which directly stabilizes wafer process uniformity and reduces product scrap rate. Built to meet strict semiconductor cleanroom requirements, this process fitting is made of low-outgassing and corrosion-resistant material, compatible with various reactive and inert process gases. It can withstand long-term thermal cycling and minor vibration inside the semiconductor tool, retaining excellent sealing performance during continuous fab production.

This gas assembly adopts high-precision machining and reliable sealing structure, with ultra-low internal surface roughness to reduce particle generation. The matching interface is designed for quick assembly and disassembly, which greatly simplifies maintenance work during equipment overhaul. Each unit is pre-tested for helium leak detection before delivery to guarantee zero leakage risk. The working temperature range is -10℃ to +60℃, suitable for the internal operating environment of AMAT wafer fabrication tools. This gas connector is widely used for gas circuit maintenance, aged fitting replacement and gas pipeline system reconstruction. Installing AMAT 0090-01220 can recover the airtightness of the process gas loop and avoid unexpected equipment downtime caused by gas leakage.

Specifications

Brand: AMAT (Applied Materials)

Model: 0090-01220

Product Type: Process Gas Line Fitting Assembly

Alias: Gas Assembly, Gas Connector

Material: Low outgassing, corrosion resistant alloy

Feature: Helium leak tested, particle free, cleanroom grade

Function: Gas pipeline connection, airtight gas transmission

Operating Temperature:-10℃~+60℃

Application:Semiconductor manufacturing equipment gas manifold system