Product Details

The ABX-X302 is a precision end effector and wafer gripper, also known as a transfer arm, custom manufactured for semiconductor wafer handling robot systems. It is mounted to the robotic arm end, designed to safely grip, support and transfer silicon wafers between load ports, cassettes and process chambers. This transfer arm ensures stable wafer handling during wafer loading, unloading, etching and thin film deposition processes. Made of anti-static, low outgassing and low particle material, it prevents electrostatic discharge damage to wafers and avoids surface contamination or scratches, which is critical to maintain high wafer yield in cleanroom manufacturing. Optimized for limited internal space of semiconductor equipment, this end effector features excellent structural rigidity and wear resistance, capable of enduring repeated cyclic movements and thermal cycling for long continuous fab operation.

This wafer gripper adopts precision profile design to match standard wafer dimensions, providing uniform support force to avoid wafer bending. The surface is specially treated to reduce particle generation. It comes with standard mounting interface for fast installation and replacement during equipment maintenance. Each unit is inspected for flatness and particle level before delivery. The working temperature range is -10℃ to +60℃, suitable for the internal operating environment of semiconductor wafer processing tools. This transfer arm is widely used for robot maintenance, worn end effector replacement and handling system overhaul. Installing ABX-X302 can recover stable wafer transfer performance and reduce unexpected production downtime.

Specifications

Brand: Semiconductor OEM

Model: ABX-X302

Product Type: Wafer End Effector

Alias: Wafer Gripper, Transfer Arm

Material: Anti-static, low outgassing, low particle composite

Feature: High rigidity, scratch resistant, cleanroom grade

Function: Wafer holding, robotic wafer transfer

Operating Temperature:-10℃~+60℃

Application:Semiconductor manufacturing wafer handling robot system