Product Details

The YASKAWA CACR-SR02BE12G-E is a high-performance SERVOPACK servo drive, also known as amplifier, part of Yaskawa CACR-SR series, designed for semiconductor wafer transfer automation systems. This servopack accepts analog command signals from the main controller to precisely control torque, speed and position of matched AC servo motor. It drives wafer handling robotic arms and positioning stages during wafer loading and unloading cycles. High-response motion control ensures accurate wafer positioning and smooth movement, lowering wafer vibration and collision risks to maintain stable manufacturing yield. When abnormal conditions including overload, overvoltage and encoder fault occur, the servo drive triggers built-in protection circuits and fault alarms to stop motion and protect mechanical assemblies and silicon wafers. Optimized for cleanroom cabinet environments, this servo drive adopts compact layout and strong anti-interference capability, supporting long continuous operation under vibration and thermal cycling inside fab equipment.

This amplifier integrates multiple protection functions including over-current, over-voltage, under-voltage, overload and overheat protection. LED status indicators and parameter setting interface on front panel support on-site commissioning and rapid fault diagnosis. It uses analog command input and encoder feedback to achieve closed-loop servo control. The operating temperature range is 0℃~+55℃, suitable for installation inside electrical cabinet of semiconductor manufacturing tools. This servopack is widely used for equipment maintenance, aging servo drive replacement and motion control system overhaul. Replacing YASKAWA CACR-SR02BE12G-E can restore high-precision robotic motion performance and reduce unexpected production downtime.

Specifications

Brand: YASKAWA

Model: CACR-SR02BE12G-E

Product Type: SERVOPACK Servo Drive

Alias: AC Servo Amplifier, Motion Control Unit

Series: CACR-SR

Rated Power: 0.2kW

Input Voltage: 200VAC

Feature: High response, multi-protection, analog command input, E custom variant

Function: Closed-loop control of servo motor speed, torque and position

Operating Temperature:0℃~+55℃

Application:Semiconductor wafer handling robot and precision positioning system