Product Details

The YASKAWA CACR-SR02AB2ER is a high-performance SERVOPACK servo drive, also known as amplifier, part of Yaskawa CACR-SR series, designed for precision motion control systems used in semiconductor wafer handling equipment. This servopack receives analog command signals from upper controller to precisely regulate torque, speed and position of matching AC servo motor. It drives wafer transfer robotic arms and precision positioning stages during wafer loading, unloading and process handling cycles. High-response motion control delivers accurate wafer positioning and smooth transfer movement, minimizing wafer vibration and collision risk to secure stable production yield. When faults like overload, overvoltage or encoder error occur, the servo drive activates built-in protection circuits and fault alarms to stop motion and protect mechanical assemblies and silicon wafers. Optimized for cleanroom and industrial cabinet environments, this servo drive features compact structure and strong anti-interference performance, supporting long continuous operation under vibration and thermal cycling inside fab equipment.

This amplifier integrates multiple protection functions, including over-current, over-voltage, under-voltage, overload and overheat protection. LED status indicators and parameter setting interface on front panel support on-site commissioning and rapid fault diagnosis. It adopts analog command input and encoder feedback for closed-loop servo control. The operating temperature range is 0℃~+55℃, suitable for installation inside semiconductor equipment electrical cabinet. This servopack is widely used for equipment maintenance, old servo drive replacement and motion control system overhaul. Replacing YASKAWA CACR-SR02AB2ER can restore high-precision robotic motion performance and reduce unexpected production downtime.

Specifications

Brand: YASKAWA

Model: CACR-SR02AB2ER

Product Type: SERVOPACK Servo Drive

Alias: AC Servo Amplifier, Motion Control Unit

Series: CACR-SR

Rated Power: 0.2kW

Input Voltage: 200VAC

Feature: High response, multi-protection, analog command input

Function: Closed-loop control of servo motor speed, torque and position

Operating Temperature:0℃~+55℃

Application:Semiconductor wafer handling robot and precision positioning system