Product Details

The YASKAWA CACR-SR02AB1ER-Y1 is a high-performance SERVOPACK servo drive, also known as motion controller, belonging to Yaskawa CACR-SR series, designed for precision motion control systems, widely adopted in semiconductor wafer handling equipment. This servopack receives analog command signals from host controller to precisely control speed, torque and position of matched AC servo motor. It drives robotic arms, wafer transfer mechanisms and positioning stages during wafer loading/unloading and process handling cycles. High response motion control ensures accurate wafer positioning and smooth transfer action, reducing wafer vibration and collision risk, maintaining stable production yield. If overload, overvoltage or encoder fault occurs, the servo drive will trigger built-in protection and fault alarm to stop motion and protect mechanical structure and silicon wafers. Optimized for industrial and cleanroom operating environments, this servo drive adopts compact cabinet-mounted design with strong anti-interference capability, supporting long-term continuous operation under vibration and thermal cycling in fab equipment.

This motion controller integrates multiple protection functions including over-current, over-voltage, under-voltage, overload and overheat protection. Front panel equipped with LED status indicators and parameter setting interface for commissioning and on-site fault diagnosis. It supports analog command input and encoder feedback for closed-loop servo control. The operating temperature range is 0℃~+55℃, suitable for semiconductor equipment cabinet installation environment. This servopack is widely used for equipment maintenance, old servo drive replacement and motion control system overhaul. Replacing YASKAWA CACR-SR02AB1ER-Y1 can restore high-precision robotic motion performance and reduce unexpected production downtime.

Specifications

Brand: YASKAWA

Model: CACR-SR02AB1ER-Y1

Product Type: SERVOPACK Servo Drive

Alias: AC Servo Amplifier, Motion Control Unit

Series: CACR-SR

Rated Power: 0.2kW

Input Voltage: 200VAC

Feature: High response, multi-protection, analog command input

Function: Servo motor speed, torque and position closed-loop control

Operating Temperature:0℃~+55℃

Application:Semiconductor wafer handling robot and precision positioning system